Effect of a Misidentified Centre of a Type ASG Material Measure on the Determined Topographic Spatial Resolution of an Optical Point Sensor
Schaude J., Gröschl A., Hausotte T.surface metrology, topographic spatial resolution, lateral period limit, type ASG materialmeasure, Siemens star, confocal sensor, nano measuring machine
| Document type | Article |
| Journal title / Source | Metrology |
| Volume | 2 |
| Issue | 1 |
| Page numbers / Article number | 19-32 |
| Publisher's name | MDPI |
| Publication date | 2022-1 |
| DOI | 10.3390/metrology2010002 |
| Web URL | https://www.mdpi.com/2673-8244/2/1/2 |
| Language | English |