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The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

Interferometric coherent Fourier scatterometry: a method for obtaining high sensitivity in the optical inverse-grating problem

Roy, S., Kumar, N., Pereira, S. and Urbach, H.

Fourier scatterometry

Document typeArticle
Journal title / SourceJournal of Optics
Publication date 2013

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