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Interferometric coherent Fourier scatterometry: a method for obtaining high sensitivity in the optical inverse-grating problem

Roy, S., Kumar, N., Pereira, S. and Urbach, H.
Keywords:

Fourier scatterometry

Document typeArticle
Journal title / SourceJournal of Optics
Volume15
Publication date 2013
DOI10.1088/2040-8978/15/7/075707
LanguageEnglish

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