Elemental depth profiling in transparent conducting oxide thin film by X-ray reflectivity and grazing incidence X-ray fluorescence combined analysis
Rotella, H., Caby, B., Ménesguen, Y., Mazel, Y., Valla, A., Ingerle, D., Detlefs, B. (CEA Laboratory of Electronics and Information Technologies (LETI), Minatec Campus, 17 rue des Martyrs, 38054 Grenoble, France), Lépy, M.-C., Novikova, A., Rodriguez, G., Streli, C. and Nolot, E. (CEA-LETI, 17 rue des Martyrs, 38054 Grenoble, France)Combined >XRR-GIXRF, Depth profiling, thin films, TCO
| Document type | Article |
| Journal title / Source | Spectrochimica Acta Part B: Atomic Spectroscopy |
| Volume | 135 |
| Page numbers / Article number | 22-28 |
| Publisher's name | Elsevier BV |
| Publication date | 2017-09 |
| ISSN | 0584-8547 |
| DOI | 10.1016/j.sab.2017.06.011 |
| Language | English |