Applications of Tactile Microprobes for Surface Metrology
Reuter C., Reum A., Fahrbach M., Peiner E., Brand U., Hofmann M. , Rangelow I.piezoresistive cantilever, MEMS, atomic force microscopy, contact resonance, surfaceroughness
Document type | Proceedings |
Journal title / Source | SMSI 2020 - Sensors and Instrumentation |
Volume | Chapter A6 |
Issue | 2020 |
Page numbers / Article number | 87-88 |
Publisher's name | AMA Association for Sensors and Measurement |
Publication date | 2020-6 |
Conference name | SMSI 2020 |
Conference date | 22-06-2020 to 25-06-2020 |
Conference place | Nuremberg, Germany |
ISBN | 978-3-9819376-2-6 |
Language | English |
Persistent Identifier | https://www.ama-science.org/proceedings/details/3655 |