Versatilely tuned vertical silicon nanowire arrays by cryogenic reactive ion etching as a lithium-ion battery anode
Refino A.D., Yulianto N., Syamsu I., Nugroho A.P., Hawari N.H., Syring A., Kartini E., Iskandar F., Voss T., Sumboja A., Peiner E., Wasisto H.S.high-aspect-ratio silicon (Si), nanowire array, lithium ion batteries, ICP-RIE
Document type | Article |
Journal title / Source | Scientific Reports |
Volume | 11 |
Issue | 1 |
Publisher's name | Springer Science and Business Media LLC |
Publication date | 2021-10 |
ISSN | 2045-2322 |
DOI | 10.1038/s41598-021-99173-4 |
Web URL | https://www.nature.com/articles/s41598-021-99173-4 |
Language | English |