Versatilely tuned vertical silicon nanowire arrays by cryogenic reactive ion etching as a lithium-ion battery anode
Refino, A.D., Yulianto, N., Syamsu, I., Nugroho, A.P., Hawari, N.H., Syring, A., Kartini, E., Iskandar, F., Voss, T., Sumboja, A., Peiner, E. (TU Braunschweig) and Wasisto, H.S.high-aspect-ratio silicon (Si), nanowire array, lithium ion batteries, ICP-RIE
| Document type | Article |
| Journal title / Source | Scientific Reports |
| Volume | 11 |
| Issue | 1 |
| Publisher's name | Springer Science and Business Media LLC |
| Publication date | 2021-10 |
| ISSN | 2045-2322 |
| DOI | 10.1038/s41598-021-99173-4 |
| Web URL | https://www.nature.com/articles/s41598-021-99173-4 |
| Language | English |