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Reference-free grazing incidence x-ray fluorescence and reflectometry as a methodology for independent validation of x-ray reflectometry on ultrathin layer stacks and a depth-dependent characterization

Honicke, P. (Physikalisch-Technische Bundesanstalt (PTB), Abbestr. 2-12, 10587 Berlin, Germany), Detlefs, B. (CEA Laboratory of Electronics and Information Technologies (LETI), Minatec Campus, 17 rue des Martyrs, 38054 Grenoble, France), Nolot, E. (CEA-LETI, 17 rue des Martyrs, 38054 Grenoble, France), Kayser, Y., Mühle, U., Pollakowski, B. and Beckhoff, B.
Keywords:

XRR, GIXRF, nanolayers

Document typeArticle
Journal title / SourceJournal of Vacuum Science & Technology A
Volume37
Issue4
Page numbers / Article number041502
Publisher's nameAmerican Vacuum Society
Publication date 2019-07
ISSN0734-2101, 1520-8559
DOI10.1116/1.5094891
Web URLhttps://arxiv.org/abs/1903.01196
LanguageEnglish

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