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The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

Reference-free grazing incidence x-ray fluorescence and reflectometry as a methodology for independent validation of x-ray reflectometry on ultrathin layer stacks and a depth-dependent characterization

Honicke, P. (Physikalisch-Technische Bundesanstalt (PTB), Abbestr. 2-12, 10587 Berlin, Germany), Detlefs, B. (CEA Laboratory of Electronics and Information Technologies (LETI), Minatec Campus, 17 rue des Martyrs, 38054 Grenoble, France), Nolot, E. (CEA-LETI, 17 rue des Martyrs, 38054 Grenoble, France), Kayser, Y., Mühle, U., Pollakowski, B. and Beckhoff, B.

XRR, GIXRF, nanolayers

Document typeArticle
Journal title / SourceJournal of Vacuum Science & Technology A
Page numbers / Article number041502
Publisher's nameAmerican Vacuum Society
Publication date 2019-07
ISSN0734-2101, 1520-8559
Web URLhttps://arxiv.org/abs/1903.01196

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