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Development and characterisation of a low pressure transfer standard in the range 1 Pa to 10 kPa

Boineau, F. (LNE), Huret, S., Otal, P. and Plimmer, M.
Keywords:

pressure, vacuum, transfer standard, resonant silicon gauge, mcapacitance diaphragm gauge

Document typeArticle
Journal title / SourceACTA IMEKO
Volume7
Issue1
Page numbers / Article number80
Publisher's nameIMEKO International Measurement Confederation
Publication date 2018-04
ISSN2221-870X
DOI10.21014/acta_imeko.v7i1.496
LanguageEnglish

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