A high-accuracy working standard for absolute pressure from 5 kPa to 130 kPa
Boineau F., Huret S., Otal P., Plimmer M.absolute pressure, calibration, working standard, capacitance diaphragm gauge, resonantsilicon gauge
Document type | Article |
Journal title / Source | International Journal of Metrology and Quality Engineering |
Volume | 8 |
Page numbers / Article number | 26 |
Publisher's name | EDP Sciences |
Publication date | 2017 |
ISSN | 2107-6847 |
DOI | 10.1051/ijmqe/2017020 |
Language | English |