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Development and Synchrotron-Based Characterization of Al and Cr Nanostructures as Potential Calibration Samples for 3D Analytical Techniques

Dialameh, M., Ferrarese Lupi, F. (Laboratorio MDM, INM-CNR, Brianza, Italy), Honicke, P. (Physikalisch-Technische Bundesanstalt (PTB), Abbestr. 2-12, 10587 Berlin, Germany), Kayser, Y., Beckhoff, B., Weimann, T., Fleischmann, C. (IMEC, Kapeldreef 75, B-3001 Heverlee, Belgium), Vandervorst, W. (IMEC, Kapeldreef 75, B-3001 Heverlee, Belgium and Instituut voor Kern- en Stralingsfysica, KU Leuven, Celestijnenlaan 200D, B-3001 Leuven, Belgium), Dubček, P., Pivac, B. (Inst Ruder Boskovic, Zagreb, Croatia), Perego, M. (Laboratorio MDM, IMM-CNR), Seguini, G. (IMM-CNR), De Leo, N. and Boarino, L. (Istituto Nazionale di Ricerca Metrologica (INRiM))
Keywords:

SIMS, APT, GISAXS, 3D nanostructures, di-block copolymers

Document typeArticle
Journal title / Sourcephysica status solidi (a)
Volume215
Issue6
Page numbers / Article number1700866
Publisher's nameWiley
Publication date 2017-12
ISSN1862-6300
DOI10.1002/pssa.201700866
LanguageEnglish

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