Development and Synchrotron-Based Characterization of Al and Cr Nanostructures as Potential Calibration Samples for 3D Analytical Techniques
Dialameh M., Ferrarese Lupi F., Honicke P., Kayser Y., Beckhoff B., Weimann T., Fleischmann C., Vandervorst W., Dubček P., Pivac B., Perego M., Seguini G., De Leo N., Boarino L.SIMS, APT, GISAXS, 3D nanostructures, di-block copolymers
| Document type | Article |
| Journal title / Source | physica status solidi (a) |
| Volume | 215 |
| Issue | 6 |
| Page numbers / Article number | 1700866 |
| Publisher's name | Wiley |
| Publication date | 2017-12 |
| ISSN | 1862-6300 |
| DOI | 10.1002/pssa.201700866 |
| Language | English |