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Impact of Chuck Boundary Conditions on Wideband On-Wafer Measurements

Phung, G.N. and Arz, U. (PTB, Braunschweig, Germany)
Keywords:

coplanar waveguides, leakage, radiation, surface waves

Document typeProceeding
Journal title / Source2021 IEEE 25th Workshop on Signal and Power Integrity (SPI)
Page numbers / Article number1-4
Publisher's nameIEEE
Publication date 2021-05-10
Conference name2021 IEEE 25th Workshop on Signal and Power Integrity (SPI)
Conference date10-05-2021 to 12-05-2021
Conference placeSiegen, Germany
DOI10.1109/SPI52361.2021.9505192
Web URLhttps://oar.ptb.de/files/download/618907218e2a000011003f97
LanguageEnglish

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