Impact of Chuck Boundary Conditions on Wideband On-Wafer Measurements

Phung G.N., Arz U.
Keywords:

coplanar waveguides, leakage, radiation, surface waves

Document type Proceedings
Journal title / Source 2021 IEEE 25th Workshop on Signal and Power Integrity (SPI)
Page numbers / Article number 1-4
Publisher's name IEEE
Publication date 2021-5-10
Conference name 2021 IEEE 25th Workshop on Signal and Power Integrity (SPI)
Conference date 10-05-2021 to 12-05-2021
Conference place Siegen, Germany
DOI 10.1109/SPI52361.2021.9505192
Web URL https://oar.ptb.de/files/download/618907218e2a000011003f97
Language English

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