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Implementation of multi-opening orifices in the primary metrology of vacuums and small gas throughputs

Peksa, Ladislav, Gronych, Tomáš, Jeřáb, Martin, Vičar, Martin, Staněk, František, Krajíček, Zdeněk and Pražák, Dominik
Keywords:

orifice, multi-opening-orifice, orifice flow standard, gas throughput

Document typeArticle
Journal title / SourceVacuum
Volume101
Publication date 2014
ISSN0042-207X/$
DOI10.1016/j.vacuum.2013.10.014
LanguageEnglish

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