Implementation of multi-opening orifices in the primary metrology of vacuums and small gas throughputs
Peksa Ladislav, Gronych Tomáš, Jeřáb Martin, Vičar Martin, Staněk František, Krajíček Zdeněk, Pražák Dominikorifice, multi-opening-orifice, orifice flow standard, gas throughput
| Document type | Article |
| Journal title / Source | Vacuum |
| Volume | 101 |
| Publication date | 2014 |
| ISSN | 0042-207X/$ |
| DOI | 10.1016/j.vacuum.2013.10.014 |