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Optimizing a Cantilever Measurement System towards High Speed, Nonreactive Contact-Resonance-Profilometry

Peiner, E. (TU Braunschweig), Xu, J., Bertke, M., Voss, T., Krieg, L. and Fahrbach, M.
Keywords:

contact resonance spectroscopy; layer analysis; piezoresistive; tactile cantilever;automatic gain control; phase-locked-loop

Document typeProceeding
Journal title / SourceProceedings
Volume2
Issue13
Page numbers / Article number889
Publisher's nameMDPI AG
Publication date 2018-11-21
Conference nameEurosensors 2018
Conference date09-09-2018 to 12-09-2018
Conference placeGraz, Austria
ISSN2504-3900
DOI10.3390/proceedings2130889
Web URLhttps://www.mdpi.com/2504-3900/2/13/889
LanguageEnglish

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