Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm

Brand U., XU M., Doering L., Langfahl-Klabes J., Behle H., Bütefisch S., Ahbe T., Mickan B., Peiner E., Völlmeke S., Frank T., Kiselev I., Drexel M., Hauptmannl M.
Keywords:

cantilever microprobe, high-speed, contact resonance, tip wear, piezo-resistive, mechanical damping, tip-testing standard, cantilevers, micromechanical devices, surface topography measurement, shape measurement

Document type Datasets
Journal title / Source Open Access Repository PTB
Publisher's name Physikalisch-Technische Bundesanstalt (PTB)
DOI 10.7795/720.20200515
Web URL https://oar.ptb.de/resources/show/10.7795/720.20200515
Language English

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