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Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm

Brand, U., XU, M. (PTB), Doering, L., Langfahl-Klabes, J., Behle, H., Bütefisch, S., Ahbe, T. (PTB, Braunschweig, Germany), Mickan, B. (PTB), Peiner, E. (TU Braunschweig), Völlmeke, S., Frank, T., Kiselev, I., Drexel, M. and Hauptmannl, M.
Keywords:

cantilever microprobe, high-speed, contact resonance, tip wear, piezo-resistive, mechanical damping, tip-testing standard, cantilevers, micromechanical devices, surface topography measurement, shape measurement

Document typeDatasets
Journal title / SourceOpen Access Repository PTB
Publisher's namePhysikalisch-Technische Bundesanstalt (PTB)
DOI10.7795/720.20200515
Web URLhttps://oar.ptb.de/resources/show/10.7795/720.20200515
LanguageAbkhazian

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