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Application of the differential Fabry–Perot interferometer in angle metrology

Özgür, B., Akgöz, A., Hamid, R., Yandayan, T., Şahin, E., Çelik, M., Çetintaş, M. and Yandyan, T.
Keywords:

Angle metrology, Differential Fabry–Perot interferometry, small angle generators, autocollimators, Synchrotron and X-FEL optics

Document typeArticle
Journal title / SourceMeasurement Science and Technology
Volume27
Issue3
Page numbers / Article number035201
Publisher's nameIOP Publishing
Publication date 2016-01-20
ISSN0957-0233, 1361-6501
DOI10.1088/0957-0233/27/3/035201
LanguageEnglish

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