Setup of a high-precision profilometer and comparison of tactile and optical measurements of standards
Nouira H, Salgado J-A, El-Hayek N, Ducourtieux S, Delvallée A, Anwer Nprofilometer, atomic force microscopy, confocal chromatic probe, tactile/inductive probe, error sources, dimensional and mechanical metrology, evaluation
| Document type | Article |
| Journal title / Source | Measurement Science and Technology |
| Volume | 25 |
| Publication date | 2014-3-5 |
| ISSN | Online ISSN: 1742-6596 |
| DOI | 10.1088/0957-0233/25/4/044011 |
| Web URL | http://iopscience.iop.org/0957-0233/25/4/044011/article?fromSearchPage=true |