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Setup of a high-precision profilometer and comparison of tactile and optical measurements of standards

Nouira, H, Salgado, J-A, El-Hayek, N, Ducourtieux, S, Delvallée, A and Anwer, N
Keywords:

profilometer, atomic force microscopy, confocal chromatic probe, tactile/inductive probe, error sources, dimensional and mechanical metrology, evaluation

Document typeArticle
Journal title / SourceMeasurement Science and Technology
Volume25
Publication date 2014-03-5
ISSNOnline ISSN: 1742-6596
DOI10.1088/0957-0233/25/4/044011
Web URLhttp://iopscience.iop.org/0957-0233/25/4/044011/article?fromSearchPage=true
LanguageEnglish

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