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The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

Setup of a high-precision profilometer and comparison of tactile and optical measurements of standards

Nouira, H, Salgado, J-A, El-Hayek, N, Ducourtieux, S, Delvallée, A and Anwer, N

profilometer, atomic force microscopy, confocal chromatic probe, tactile/inductive probe, error sources, dimensional and mechanical metrology, evaluation

Document typeArticle
Journal title / SourceMeasurement Science and Technology
Publication date 2014-03-5
ISSNOnline ISSN: 1742-6596
Web URLhttp://iopscience.iop.org/0957-0233/25/4/044011/article?fromSearchPage=true

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