A substitution method for nanoscale capacitance calibration using scanning microwave microscopy
Morán-Meza J.A., Delvallée A., Allal D., Piquemal F.-
Document type | Article |
Journal title / Source | Measurement Science and Technology |
Volume | 31 |
Issue | 7 |
Page numbers / Article number | 074009 |
Publisher's name | IOP Publishing |
Publication date | 2020-5 |
ISSN | 0957-0233, 1361-6501 |
DOI | 10.1088/1361-6501/ab82c1 |
Language | English |