A substitution method for nanoscale capacitance calibration using scanning microwave microscopy
Morán-Meza, J.A., Delvallée, A., Allal, D. and Piquemal, F.-
| Document type | Article |
| Journal title / Source | Measurement Science and Technology |
| Volume | 31 |
| Issue | 7 |
| Page numbers / Article number | 074009 |
| Publisher's name | IOP Publishing |
| Publication date | 2020-05 |
| ISSN | 0957-0233, 1361-6501 |
| DOI | 10.1088/1361-6501/ab82c1 |
| Language | English |