Model-based interfacing of large-scale metrology instruments

Montavon B., Peterek M., Schmitt R.H.
Keywords:

Large-Scale Metrology, Internet of Production, Cyper Physical Production Systems

Document type Proceedings
Journal title / Source Multimodal Sensing: Technologies and Applications
Publisher's name SPIE
Publication date 2019-6-21
Conference name SPIE Optical Metrology
Conference date 24-06-2019 to 28-06-2019
Conference place Munich
DOI 10.1117/12.2527461
Web URL http://arxiv.org/abs/2001.05897
Language English

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