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Model-based interfacing of large-scale metrology instruments

Montavon, B., Peterek, M. (RWTH, Aachen, Germany) and Schmitt, R.H.
Keywords:

Large-Scale Metrology, Internet of Production, Cyper Physical Production Systems

Document typeProceeding
Journal title / SourceMultimodal Sensing: Technologies and Applications
Publisher's nameSPIE
Publication date 2019-06-21
Conference nameSPIE Optical Metrology
Conference date24-06-2019 to 28-06-2019
Conference placeMunich
DOI10.1117/12.2527461
Web URLhttp://arxiv.org/abs/2001.05897
LanguageEnglish

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