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Comparing AFM cantilever stiffness measured using the thermal vibration and the improved thermal vibration methods with that of an SI traceable method based on MEMS

Milles, L.F., Stahl, S.W., Sulzbach, T., Engl, W., Gao, S., Brand, U., Nesterov, V. (PTB, Braunschweig, Germany) and Li, Z. (PTB)
Keywords:

cantilever stiffness calibration, active reference spring, micro-electro-mechanical system

Document typeArticle
Journal title / SourceMeasurement Science and Technology
Volume28
Issue3
Page numbers / Article number034010
Publisher's nameIOP Publishing
Publication date 2017-01-23
ISSN0957-0233, 1361-6501
DOI10.1088/1361-6501/28/3/034010
Web URLhttp://iopscience.iop.org/article/10.1088/1361-6501/28/3/034010/pdf
LanguageEnglish

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