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Overcoming the refractivity limit in manufacturing environment

Meiners-Hagen, K., Meyer, T., Prellinger, G. (PTB, Braunschweig, Germany), Pöschel, W. (SIOS Meßtechnik GmbH, Ilmenau, Germany), Dontsov, D. and Pollinger, F.
Keywords:

interferometry, refractivity-compensation, temperature, laser range finder, optical inspection, refractivity profiles, precision engineering, self-tracking

Document typeArticle
Journal title / SourceOptics Express
Volume24
Issue21
Page numbers / Article numberpp. 24092-24104
Publisher's nameOSA
Publication date 2016
DOI10.1364/OE.24.024092
Web URLhttps://www.osapublishing.org/oe/fulltext.cfm?uri=oe-24-21-24092&id=351024
LanguageEnglish

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