Overcoming the refractivity limit in manufacturing environment

Meiners-Hagen K., Meyer T., Prellinger G., Pöschel W., Dontsov D., Pollinger F.
Keywords:

interferometry, refractivity-compensation, temperature, laser range finder, optical inspection, refractivity profiles, precision engineering, self-tracking

Document type Article
Journal title / Source Optics Express
Volume 24
Issue 21
Page numbers / Article number pp. 24092-24104
Publisher's name OSA
Publication date 2016
DOI 10.1364/OE.24.024092
Web URL https://www.osapublishing.org/oe/fulltext.cfm?uri=oe-24-21-24092&id=351024
Language English

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