Step height standards based on self-assembly for 3D metrology of biological samples

Heikkinen V., Kassamakov I., Viitala T., Järvinen M., Vainikka T., Nolvi A., Bermudez C., Artigas R., Martinez P., Korpelainen V., Lassila A.
Keywords:

nanometrology, transfer standard, calibration, CSI, SWLI, AFM, traceability

Document type Article
Journal title / Source Measurement Science and Technology
Publisher's name IOP Publishing
Publication date 2020-4-23
ISSN 0957-0233, 1361-6501
DOI 10.1088/1361-6501/ab8c6a
Language English

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