Step height standards based on self-assembly for 3D metrology of biological samples
Heikkinen, V., Kassamakov, I., Viitala, T., Järvinen, M., Vainikka, T., Nolvi, A., Bermudez, C., Artigas, R., Martinez, P., Korpelainen, V. and Lassila, A.nanometrology, transfer standard, calibration, CSI, SWLI, AFM, traceability
| Document type | Article |
| Journal title / Source | Measurement Science and Technology |
| Publisher's name | IOP Publishing |
| Publication date | 2020-04-23 |
| ISSN | 0957-0233, 1361-6501 |
| DOI | 10.1088/1361-6501/ab8c6a |
| Language | English |