Dynamic vacuum measurement by an optical interferometric technique

Mari Domenico, Bergoglio Mercede, Pisani Marco, Zucco Massimo
Keywords:

dynamic vacuum standard, laser interferometry, nanometrology, vacuum gauge

Document type Article
Journal title / Source Measurement Science and Technology
Volume 25 (Dec 2014).
Issue 12
Publication date 2014-11
DOI 10.1088/0957-0233/25/12/125303

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