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Dynamic vacuum measurement by an optical interferometric technique

Mari, Domenico, Bergoglio, Mercede, Pisani, Marco and Zucco, Massimo
Keywords:

dynamic vacuum standard, laser interferometry, nanometrology, vacuum gauge

Document typeArticle
Journal title / SourceMeasurement Science and Technology
Volume25 (Dec 2014).
Issue12
Publication date 2014-11
DOI10.1088/0957-0233/25/12/125303
LanguageEnglish

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