Laboratory grazing-incidence X-ray fluorescence spectroscopy as an analytical tool for the investigation of sub-nanometer CrSc multilayer water window optics

Mantouvalou I., Jonnard P., Szwedowski-Rammert V., Meltchakov E., Kanngießer B., Wu M., Honicke P., Waldschläger U., Gross A., Baumann J., Goetzke G., Delmotte F.
Keywords:

GIXRFMultilayer characterization

Document type Article
Journal title / Source Spectrochimica Acta Part B: Atomic Spectroscopy
Volume 174
Page numbers / Article number 105995
Publisher's name Elsevier BV
Publication date 2020-10-10
ISSN 0584-8547
DOI 10.1016/j.sab.2020.105995
Web URL https://arxiv.org/abs/2006.12198
Language English

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