Coherence scanning interferometry: measurement and correction of 3D transfer and point-spread characteristics

Mandal R, Coupland J M, Leach R K, Mansfield D l
Keywords:

Fourier optics and signal processing; Instrumentation, measurement and metrology; Optical standards and testing; Surface measurements; Coherence tomography; Three-dimensional microscopy

Document type Article
Journal title / Source Applied Optics
Volume 53
Issue 8
Page numbers / Article number 1554 to 1563
Publication date 2014
DOI 10.1364/AO.53.001554
Web URL http://www.opticsinfobase.org/ao/abstract.cfm?uri=ao-53-8-1554

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