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TILTED WAVE INTERFEROMETER – DESIGN AND TEST

Lotz, M., Siepmann, J., Mühlig, S., Jung, S. and Baer, G.
Keywords:

Tilted Wave Interferometer, Asphere and freeform measurement, Design

Document typeProceeding
Journal title / SourceProceedings of 58th Ilmenau Scientific Colloqium
Volume58
Publication date 2014-11-11
Conference name58th ILMENAU SCIENTIFIC COLLOQUIUM
Conference date8.-12. September 2014
Conference placeTechnische Universität Ilmenau, Ilmenau, Germany
Web URLhttp://www.db-thueringen.de/servlets/DerivateServlet/Derivate-30704/ilm1-2014iwk-117.pdf

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