Welcome to the EURAMET Repository Link

The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

Nano-holes as standard leak elements

Lerardi, V., Becker, U., Pantazis, S., Firpo, G., Valbusa, U. and Jousten, K.

Focused ion beam,Nanotechnology, SEM, STEM, AFM, Standard leak, Gas flow meter, Vacuum Metrology, DSMC.

Document typeArticle
Journal title / SourceMeasurement
Publication date 2014-09-16

Back to the list view