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Nano-holes as standard leak elements

Lerardi, V., Becker, U., Pantazis, S., Firpo, G., Valbusa, U. and Jousten, K.
Keywords:

Focused ion beam,Nanotechnology, SEM, STEM, AFM, Standard leak, Gas flow meter, Vacuum Metrology, DSMC.

Document typeArticle
Journal title / SourceMeasurement
Volume58
Publication date 2014-09-16
DOI10.1016/j.measurement.2014.09.017
LanguageEnglish

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