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Three-Dimensional Transfer Functions of Interference Microscopes

Lehmann, P., Hagemeier, S. and Pahl, T.
Keywords:

interference microscopy, coherence scanning interferometry, three-dimensional transfer function

Document typeArticle
Journal title / SourceMetrology
Volume1
Issue2
Page numbers / Article number122-141
Publisher's nameMDPI AG
Publication date 2021-11
ISSN2673-8244
DOI10.3390/metrology1020009
Web URLhttps://www.mdpi.com/2673-8244/1/2/9/htm
LanguageEnglish

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