Three-Dimensional Transfer Functions of Interference Microscopes

Lehmann P., Hagemeier S., Pahl T.
Keywords:

interference microscopy, coherence scanning interferometry, three-dimensional transfer function

Document type Article
Journal title / Source Metrology
Volume 1
Issue 2
Page numbers / Article number 122-141
Publisher's name MDPI AG
Publication date 2021-11
ISSN 2673-8244
DOI 10.3390/metrology1020009
Web URL https://www.mdpi.com/2673-8244/1/2/9/htm
Language English

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