Three-Dimensional Transfer Functions of Interference Microscopes [Dataset]

Keywords:

interference microscopy, coherence scanning interferometry, three-dimensional transfer function

Document type Datasets
Journal title / Source Metrology
Volume 1
Issue 2
Page numbers / Article number 122-141
Publisher's name MDPI AG
ISSN 2673-8244
DOI 10.3390/metrology1020009
Web URL https://www.mdpi.com/2673-8244/1/2/9/htm
Language English

Back to the list view