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Interpreting the probe-surface interaction of surface measuring instruments, or what is a surface?

Leach, R K, Weckenmann, A, Coupland, J M and Hartmann, W
Keywords:

surface topography, function, electromagnetic surface, mechanical surface, electrical surface

Document typeProceeding
Journal title / SourceSurface Topography: Metrology and Properties
Volume2
Issue035001
Publication date 2014-07-4
Conference nameInternational Precision Engineering Seminar
Conference date13-19 Feb 2014
Conference placeChamonix France
DOI10.1088/2051-672X/2/3/035001
Web URLhttp://iopscience.iop.org/2051-672X/2/3/035001/pdf/STMP_2_3_035001.pdf
LanguageEnglish

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