Interpreting the probe-surface interaction of surface measuring instruments, or what is a surface?

Leach R K, Weckenmann A, Coupland J M, Hartmann W
Keywords:

surface topography, function, electromagnetic surface, mechanical surface, electrical surface

Document type Proceedings
Journal title / Source Surface Topography: Metrology and Properties
Volume 2
Issue 035001
Publication date 2014-7-4
Conference name International Precision Engineering Seminar
Conference date 13-19 Feb 2014
Conference place Chamonix France
DOI 10.1088/2051-672X/2/3/035001
Web URL http://iopscience.iop.org/2051-672X/2/3/035001/pdf/STMP_2_3_035001.pdf

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