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Design and performance of a test rig for evaluation of nanopositioning stages

Yacoot, Andrew (National Physical Laboratory, Hampton Road, Teddington, Middlesex, TW11 0LW), Klapetek, Petr (Cesky Metrologicky Institut Brno, Okružní 31, CZ-638 00 Brno), Valtr, Miroslav, Grolich, Petr, Dongmo, Herve, Lazzerini, Giovanni M and Bridges, Angus
Keywords:

multi-axis positioning stages, traceability, nanopositioning, dimensional metrology

Document typeArticle
Journal title / SourceMeasurement Science and Technology
Volume30
Issue3
Page numbers / Article number035002
Publisher's nameIOP Publishing
Publication date 2019-02
ISSN0957-0233, 1361-6501
DOI10.1088/1361-6501/aafd03
LanguageEnglish

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