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The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

Design and performance of a test rig for evaluation of nanopositioning stages

Yacoot, Andrew (National Physical Laboratory, Hampton Road, Teddington, Middlesex, TW11 0LW), Klapetek, Petr (Cesky Metrologicky Institut Brno, Okružní 31, CZ-638 00 Brno), Valtr, Miroslav, Grolich, Petr, Dongmo, Herve, Lazzerini, Giovanni M and Bridges, Angus

multi-axis positioning stages, traceability, nanopositioning, dimensional metrology

Document typeArticle
Journal title / SourceMeasurement Science and Technology
Page numbers / Article number035002
Publisher's nameIOP Publishing
Publication date 2019-02
ISSN0957-0233, 1361-6501

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