Design and performance of a test rig for evaluation of nanopositioning stages
Yacoot, Andrew (National Physical Laboratory, Hampton Road, Teddington, Middlesex, TW11 0LW), Klapetek, Petr (Cesky Metrologicky Institut Brno, Okružní 31, CZ-638 00 Brno), Valtr, Miroslav, Grolich, Petr, Dongmo, Herve, Lazzerini, Giovanni M and Bridges, Angusmulti-axis positioning stages, traceability, nanopositioning, dimensional metrology
Document type | Article |
Journal title / Source | Measurement Science and Technology |
Volume | 30 |
Issue | 3 |
Page numbers / Article number | 035002 |
Publisher's name | IOP Publishing |
Publication date | 2019-02 |
ISSN | 0957-0233, 1361-6501 |
DOI | 10.1088/1361-6501/aafd03 |
Language | English |