Design and performance of a test rig for evaluation of nanopositioning stages
Lazzerini, Giovanni M, Dongmo, Herve, Grolich, Petr, Valtr, Miroslav, Klapetek, Petr (Cesky Metrologicky Institut Brno, Okružní 31, CZ-638 00 Brno), Yacoot, Andrew (National Physical Laboratory, Hampton Road, Teddington, Middlesex, TW11 0LW) and Bridges, Angusmulti-axis positioning stages, traceability, nanopositioning, dimensional metrology
| Document type | Article |
| Journal title / Source | Measurement Science and Technology |
| Volume | 30 |
| Issue | 3 |
| Page numbers / Article number | 035002 |
| Publisher's name | IOP Publishing |
| Publication date | 2019-02 |
| ISSN | 0957-0233, 1361-6501 |
| DOI | 10.1088/1361-6501/aafd03 |
| Language | English |