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The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

Phase retrieval between overlapping orders in coherentFourier scatterometry using scanning

Kumar, N., El Gawhary, O., Roy, S., Pereira, S. and Urbach, H.

Fourier scatterometry

Document typeArticle
Journal title / SourceJournal of the European Optical Society Rapid Publications
Peer-reviewed articleYes
Publication date 2013

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