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Sub-Wavelength Features in Spectroscopic Mueller Matrix Ellipsometry

Kroker, Stefanie, Wurm, Matthias, Siefke, Thomas, Käseberg, Tim and Bodermann, Bernd
Keywords:

Gratings, Measurement Technology, Scatterometry

Document typeProceeding
Journal title / SourceDeutsche Gesellschaft für angewandte Optik Proceedings 2019
Volume120
Publisher's nameDeutsche Gesellschaft für angewandte Optik e.V. (DGaO)
Publication date 2019-09
Conference name120. Jahrestagung der Deutschen Gesellschaft für angewandte Optik
Conference date11-06-2019 to 15-06-2019
Conference placeDarmstadt
ISSN1614-8436
Web URLhttps://www.dgao-proceedings.de/download/120/120_p9.pdf
LanguageEnglish

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