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The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

Sub-Wavelength Features in Spectroscopic Mueller Matrix Ellipsometry

Kroker, Stefanie, Wurm, Matthias, Siefke, Thomas, Käseberg, Tim and Bodermann, Bernd

Gratings, Measurement Technology, Scatterometry

Document typeProceeding
Journal title / SourceDeutsche Gesellschaft für angewandte Optik Proceedings 2019
Publisher's nameDeutsche Gesellschaft für angewandte Optik e.V. (DGaO)
Publication date 2019-09
Conference name120. Jahrestagung der Deutschen Gesellschaft für angewandte Optik
Conference date11-06-2019 to 15-06-2019
Conference placeDarmstadt
Web URLhttps://www.dgao-proceedings.de/download/120/120_p9.pdf

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