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The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

Mueller matrix ellipsometry for enhanced optical form metrology of sub-lambda structures

Käseberg, T., Dickmann, J., Siefke, T., Wurm, M., Kroker, S. and Bodermann, B.

Plasmonics, Ellipsometry, Scanning electron microscopy, Numerical simulations, Metrology, Nanostructures, Near field optics

Document typeProceeding
Journal title / SourceModeling Aspects in Optical Metrology VII
Page numbers / Article number155-165
Publisher's nameSPIE
Publication date 2019-06-21
Conference nameInternational Society for Optics and Photonics Optical Metrology
Conference date24-06-2019 to 27-06-2019
Conference placeMunich

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