Mueller Matrix Ellipsometric Approach on the Imaging of Sub-Wavelength Nanostructures
Kroker S., Valtr M., Klapetek P., Grundmann J., Siefke T., Käseberg T., Bodermann B.metrology, nanometrology, ellipsometry, mueller ellipsometry, imaging ellipsometry, nanostructures,mueller matrix ellipsometry
Document type | Article |
Journal title / Source | Frontiers in Physics |
Volume | 9 |
Page numbers / Article number | 814559 |
Publisher's name | Frontiers Media SA |
Publication date | 2022-1-21 |
ISSN | 2296-424X |
DOI | 10.3389/fphy.2021.814559 |
Language | English |