Mueller Matrix Ellipsometric Approach on the Imaging of Sub-Wavelength Nanostructures

Kroker S., Valtr M., Klapetek P., Grundmann J., Siefke T., Käseberg T., Bodermann B.
Keywords:

metrology, nanometrology, ellipsometry, mueller ellipsometry, imaging ellipsometry, nanostructures,mueller matrix ellipsometry

Document type Article
Journal title / Source Frontiers in Physics
Volume 9
Page numbers / Article number 814559
Publisher's name Frontiers Media SA
Publication date 2022-1-21
ISSN 2296-424X
DOI 10.3389/fphy.2021.814559
Language English

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