Ellipsometric porosimetry on pore-controlled TiO2 layers

Kraehnert Ralph, Hodoroaba Vasile-Dan, Ortel Erik, Rosu Dana-Maria, Hertwig Andreas
Keywords:

Spectroscopic ellipsometry; Porous materials; Porosimetry; Multi-sample analysis; Thin film metrology

Document type Article
Journal title / Source Applied Surface Science
Publisher's name Elsevier BV
Publisher's address (city only) New York, USA
Publication date 2016-11
ISSN 0169-4332
DOI 10.1016/j.apsusc.2016.11.055
Language English

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