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Ellipsometric porosimetry on pore-controlled TiO2 layers

Kraehnert, Ralph, Hodoroaba, Vasile-Dan, Ortel, Erik, Rosu, Dana-Maria and Hertwig, Andreas
Keywords:

Spectroscopic ellipsometry; Porous materials; Porosimetry; Multi-sample analysis; Thin film metrology

Document typeArticle
Journal title / SourceApplied Surface Science
Publisher's nameElsevier BV
Publisher's address (city only)New York, USA
Publication date 2016-11
ISSN0169-4332
DOI10.1016/j.apsusc.2016.11.055
LanguageEnglish

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