High Performance Predictable Quantum Efficient Detector Based on Induced-Junction Photodiodes Passivated with SiO2/SiNx

Koybasi O., Nordseth Ø., Tran T., Povoli M., Rajteri M., Pepe C., Bardalen E., Manoocheri F., Summanwar A., Korpusenko M., Getz M.N., Ohlckers P., Ikonen E., Gran J.
Keywords:

Silicon Photodetector; Inversion Layer Photodiode; Induced-Junction; Surface Pas-Sivation; PECVD Silicon Nitride; Radiometry; Optical Power; Primary Standard; Predictable Quantum Efficiency (1)

Document type Datasets
Journal title / Source Sensors
Volume 21
Page numbers / Article number 7807
Publisher's name MDPI
ISSN ISSN 1424-8220
DOI 10.5281/Zenodo.5720711
Web URL https://zenodo.org/record/5720711

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