Accurate tip characterization in critical dimension atomic force microscopy

Dai G., Korpelainen V., Xu L., Hahm K.
Keywords:

atomic force microscopy (AFM), critical dimension (CD), tip characterization, tip correction, morphological operation, dimensional nanometrology, 3D nanometrology

Document type Article
Journal title / Source Measurement Science and Technology
Publisher's name IOP Publishing
Publication date 2020-3-13
ISSN 0957-0233, 1361-6501
DOI 10.1088/1361-6501/ab7fd2
Language English

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