Accurate tip characterization in critical dimension atomic force microscopy
Dai, G., Xu, L. and Hahm, K. (Physikalisch-Technische Bundesanstalt, Braunschweig & Berlin, Bundesallee 100, D-38116, Braunschweig, Germany)atomic force microscopy (AFM), critical dimension (CD), tip characterization, tip correction, morphological operation, dimensional nanometrology, 3D nanometrology
| Document type | Article |
| Journal title / Source | Measurement Science and Technology |
| Publisher's name | IOP Publishing |
| Publication date | 2020-03-13 |
| ISSN | 0957-0233, 1361-6501 |
| DOI | 10.1088/1361-6501/ab7fd2 |
| Language | English |