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Accurate tip characterization in critical dimension atomic force microscopy

Dai, G., Xu, L. and Hahm, K. (Physikalisch-Technische Bundesanstalt, Braunschweig & Berlin, Bundesallee 100, D-38116, Braunschweig, Germany)
Keywords:

atomic force microscopy (AFM), critical dimension (CD), tip characterization, tip correction, morphological operation, dimensional nanometrology, 3D nanometrology

Document typeArticle
Journal title / SourceMeasurement Science and Technology
Publisher's nameIOP Publishing
Publication date 2020-03-13
ISSN0957-0233, 1361-6501
DOI10.1088/1361-6501/ab7fd2
LanguageEnglish

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