Large area high-speed metrology SPM system

Klapetek P, Valtr M, Picco L, Payton O D, Martinek J, Yacoot A, Miles M
Keywords:

scanning probe microscopy, high-speed SPM, metrology

Document type Article
Journal title / Source Nanotechnology
Volume 26
Issue 065501
Publication date 2015
DOI 10.1088/0957-4484/26/6/065501

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